Accuracy*: | + (0.05 mils + 1%) 0- 2 mils + (0.1 mils + 1%) > 2 mils | + (0.02 mils + 1%) 0-4 mils + (0.1 mils + 3%) > 4 mils | + (0.5 mils + 1%) 0-100 mils + (0.5 mil + 3%) > 100 mils |
+ (1 um + 1%) 0 - 50 µm + (2 um + 1%) > 50 µm | + (0.5 um + 1%) 0-100 µm + (2 um + 3%) > 100 µm | + (0.01 mm + 1%) 0-2.5 mm + (0.01 mm + 3%) > 2.5 mm |